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Business Overview

Aerospace Products

1. Landing Gears and Landing Gear Control Systems
2. Heat Management Systems
3. Propellers, Hydraulic and Pneumatic Systems
4. Space products

Heat Control Products

1. Heat exchangers for Cryogenic Applications
2. High-Temperature Heat Exchangers
3. Industrial Heat Exchangers
4. LNG Vaporizers

Hydraulic Controls

1. Coolant Components for Machine Tools, and Hydraulic Components and Hydraulic Control Systems

Ozone Generator

1. Purification of Drinking Water and Treatment of Municipal and Industrial Wastewater
2. Semiconductor & Flat Panel Display Manufacturing and Other Production Processes
3. Pulp and Textile Bleaching

MEMS/Semiconductor Manufacturing Equipment

1. Silicon Deep RIE Systems
2. Silicon Oxide Sacrificial Layer Etching Systems
3. Other Systems
4. Cluster-Type Transfer Systems

MEMS Devices

1. MEMS Gyro & Systems
2. Inertial Sensor Application Products

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