Application
What is MEMS?
MEMS is called Micro Electro Mechanical Systems. A device manufactured as a three-dimensional mechanical structure by developing microfabrication technology developed and established in semiconductor production
MEMS process
Microfabrication process that integrated circuits (LSIs) did not require Si deep etching technology (Si-DRIE)
MEMS application example
Gyro, accelerometer, Inkjet printer nozzle, Optical communication switch, Elements for mobile phones
Gyro History
Practical gyroscopes were commercialized one after another in the early 20th century. Silicon Sensing is the predecessor company of Sperry Gyroscope Company Ltd, which was established by E. Sperry in the United Kingdom in 1913, and has a history of designing and manufacturing gyroscopes for 100 years.
The Gyro 100 years onInertial Sensors and Application Products
Inertial Sensors
Sensors that detect the acceleration and angular rate of moving bodies, the rotation of the earth, and gravity
Application Products
Devices that provide information different from the physical output of the sensor, such as angle, velocity, and position, by performing calculations on the output of the inertial sensor
Inertial Sensors and Application Products
| Type | Name | Product name | Output Data | ||||||
|---|---|---|---|---|---|---|---|---|---|
| Angular velocity |
Acceleration | Attitude | Velocity | Position | |||||
| Silicon Sensing Systems | Inertial sensor | Gyro | CRM100/200, CRH03, CRS39, RPU30 |
○ | |||||
| Accelerometer | CAS200, CAS290 | ○ | |||||||
| IMU | Inertial Measurement Unit | DMU11, DMU41, MRN-01(SUMITOMO) |
○ | ○ | |||||
| SUMITOMO PRECISION PRODUCTS | VG | Vertical Gyro (Attitude Measurement Unit) |
AMU Lite, AAU-11 |
○ | ○ | ○ | |||
| AHRS | Attitude Heading Reference System | GCAH-12C-02, GCAH-12C-03, GCAH-21 |
○ | ○ | ○ | ○ | |||
| INS | Inertial Navigation System | (Under development) | ○ | ○ | ○ | ○ | ○ | ○ | |
Brand of technology to detect true north without relying on GPS
This is a revolutionary technology that combines a highly accurate MEMS gyroscope that can measure the angular velocity of the earth's rotation with a newly developed algorithm.
True north heading and attitude angle can be obtained, and a true gyrocompass can be constructed.
Detection principle of true north
- Measuring Earth's Angular Rotation Velocity with a Three-Axis Gyro
- Vector Synthesize and Calculate True North
MEMS Business Overview at Sumitomo Precision Products
Sumitomo Precision Products Co., Ltd. MEMS Solutions Department
We supply MEMS solutions that is World's most advanced, promote digital society・5G and contribute to achieve decarbonized society.
Sumitomo Precision Products Co., Ltd. MEMS Sensors and System department
- Design and development of MEMS gyro / accelerometer (*)
- Design and development of MEMS gyro / accelerometer application products (*)
(*)Supports products sold by Silicon Sensing Systems below)
Sumitomo Precision Products Co., Ltd. ICT Equipment & Devices Department
- Development of piezoelectric thin film technology:High Figure of Merit(FOM) epi-PZT thin film development
Silicon Sensing Systems Co., Ltd
- Manufacture and sale of MEMS gyros and accelerometers
- Manufacture and sale of MEMS gyro / acceleration sensor application products
- Foundry service
SPP Technologies Co., Ltd
The top manufacturer of silicon deep etching equipment for producing MEMS elements. Film deposition equipment and other various semiconductor manufacturing equipment are also manufactured