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Toward a promising future

MEMS Infinity's capabilities start from MEMS device design, development and mass production throughout the process of foundry development and production.
This allows our customers to efficiently develop their projects, and our greatest feature is that we can provide one-stop manufacturing.
As a MEMS foundry, MEMS Infinity provides services from film deposition to device processing based on PZT thin film, which has a proven track record in mass production, and in Si deep etching (Si DRIE), we provide highly challenging Si etching process by optimizing verticality, sidewall roughness, and CD loss while achieving the world's highest selectivity ratio and etch rate.


Company OverviewAbout us

住友精密工業株式会社 MEMS

1-10 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan

電話81- (0) 6-6482-8811

Sumitomo Precision Products Co., Ltd.

https://www.spp.co.jp/English/

Sumitomo Precision Products Group (SPP) offers comprehensive solutions based on its unique precision technology and manufacturing in a variety of fields, including aircraft equipment, heat exchangers, hydraulic controls, ozone generators, semiconductor manufacturing equipment, and motion sensors.

Related department in Sumitomo Precision Products Co., Ltd.

Inertial Sensor Systems Department

https://www.spp.co.jp/mems/en/

Sumitomo Precision Products is ahead of the rest of the industry in developing and manufacturing MEMS, and mass producing sensor application systems. It has achieved high precision and is already used for attitude control of space rockets and guidance control for route navigation.

Affiliated Companies

Silicon Sensing Systems Japan, Ltd.

http://www.sssj.co.jp/

Silicon Sensing Systems Ltd. is a joint venture between Sumitomo Precision Products Co., Ltd. and Collins Aerospace, which develops, manufactures, and sells acceleration sensors, gyroscopes, and IMUs.

SPP Technologies Co., Ltd.

https://www.spp-technologies.co.jp/

SPP Technologies Co., Ltd. is 100% subsidiary of Sumitomo Precision Products Co., Ltd.
It is a semiconductor manufacturing equipment manufacturer having a top-class market share in both Japan domestic and in other contries and it develops, manufactures, imports, and sells MEMS and semiconductor-related device manufacturing equipment (namely, dry process equipment).